Ultra clean processing of semiconductor surfaces XII : selected, peer reviewed papers from the 12th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS) September 21-24, 2014, Brussels, Belgium
Finna-arvio
Ultra clean processing of semiconductor surfaces XII : selected, peer reviewed papers from the 12th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS) September 21-24, 2014, Brussels, Belgium
Tallennettuna:
| Ulkoasu |
1 online resource (331 p.) |
|---|---|
| Kieli |
englanti |
| Huomautukset |
Description based upon print version of record. |
| Julkaisija |
Pfaffikon, Switzerland :
TTP,
2014.
|
| Sarja | Diffusion and defect data, Pt. B, Solid state phenomena, Volume 219. |
| Luokitus | |
| Dewey-luokitus |
621.38152 |
| Aiheet | |
| Lisätiedot | edited by Paul Mertens, Marc Meuris and Marc Heyns |
| Pääsarja |
Solid State Phenomena |
| Bibliografia |
Includes bibliographical references at the end of each chapters and index. |
| ISBN |
3-03826-626-4 |
| Huomautus kielistä |
English |