1997 2nd International Symposium on Plasma Process-Induced Damage : 13-14 May 1997, Monterey, California, USA
Finna-recension
1997 2nd International Symposium on Plasma Process-Induced Damage : 13-14 May 1997, Monterey, California, USA
Sparad:
| Språk |
engelska |
|---|---|
| Beskrivning |
Bibliographic Level Mode of Issuance: Monograph |
| Utgivare |
[Place of publication not identified]
Northern California Chapter of the American Vacuum Society,
1997
|
| Klassifikation | |
| DDK-klassifikation |
621.3815/2 |
| Ämnen | |
| Annan form |
0-9651577-1-7 |
| Anmärkning - Språk |
English |