1997 2nd International Symposium on Plasma Process-Induced Damage : 13-14 May 1997, Monterey, California, USA
Finna-arvio
1997 2nd International Symposium on Plasma Process-Induced Damage : 13-14 May 1997, Monterey, California, USA
Tallennettuna:
| Kieli |
englanti |
|---|---|
| Huomautukset |
Bibliographic Level Mode of Issuance: Monograph |
| Julkaisija |
[Place of publication not identified]
Northern California Chapter of the American Vacuum Society,
1997
|
| Luokitus | |
| Dewey-luokitus |
621.3815/2 |
| Aiheet | |
| Muu ilmiasu |
0-9651577-1-7 |
| Huomautus kielistä |
English |