MEMS mechanical sensors
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MEMS mechanical sensors
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| Physical Description |
x, 269 pages |
|---|---|
| Language |
English |
| Language of Original Work |
English |
| Publisher |
Boston :
Artech house,
2004.
|
| Series | Micromechanical systems series |
| Classification | |
| Subjects | |
| Additional Information | Stephen Beeby, Graham Ensell, Michael Kraft, Neil White |
| ISBN |
1-58053-536-4 |